Plasma-chemical kinetics simulation in KrF* excimer pulse laser

Plasma-chemical kinetics simulation in KrF* excimer pulse laser

Scientific software description


The package is intended for complex chemical or plasma-chemical non-stationary kinetics simulation. An arbitrary mixture of up to 30 individual reagents and up to 300 specific  reactions of any type ( collisional, radiative, etc. ) could be taken into account using only 128 KB of the PC addressed memory.

Lists of considered components and reactions are determined by two external text-files,  prepared by the user in ordinary way. This allows him to investigate an influence of any component or reaction upon whole process course by means of a simple turning it on/off.

During file input / recognition procedure the component and reaction lists are carefully checked  to avoid any probable mistake, which may appear in large data banks.  A population kinetics equation system, recovered from the input text files information, is solved by the special extremely quick calculation method.

In general, the package is intended for the non-stationary plasma chemical kinetics tasks with the great influence of electron - atomic collisions.  That's why electron and atom temperatures time dependencies, caused by external force and/or defined from reaction heating, are taken into account.

Moreover, there is a special advanced package - "NIKIN-B" - intended, in addition to above,  for simultaneous calculation of the real electron energy distribution function to take into account its effect upon electron impact rate coefficients.  For this purpose the non-stationary Boltzmann equation is numerically solved (see DISTREL package description).

These packages can be easily adapted for wide range of tasks concerning plasma chemical or common chemical reactions non-stationary kinetics.

In a demo program the beam / discharge - pumped KrF* excimer laser kinetics is examined with more than 20 plasma components and 120 various plasma processes included into a physical model.  A typical laser pulse simulation takes about 1 second with IBM PC /486.

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